Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry

• Main Author: Zhao, Xian.
• Other Authors: Xie, Lihua
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• Online Access: http://hdl.handle.net/10356/4031
• Institution: Nanyang Technological University

In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly...