Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry

• المؤلف الرئيسي: Zhao, Xian.
• مؤلفون آخرون: Xie, Lihua
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/4031

In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly...