Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry
In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly...
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sg-ntu-dr.10356-40312023-07-04T15:43:24Z Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry Zhao, Xian. Xie, Lihua School of Electrical and Electronic Engineering Luo, Ming DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly automatic-manufacturing systems has to be synchronized, collaborated and optimized together with the other manufacturing dynamics to find balanced and optimal ways to achieve better performance. Master of Science (Computer Control and Automation) 2008-09-17T09:42:57Z 2008-09-17T09:42:57Z 2004 2004 Thesis http://hdl.handle.net/10356/4031 Nanyang Technological University application/pdf |
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DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering |
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DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering Zhao, Xian. Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry |
| description |
In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly automatic-manufacturing systems has to be synchronized, collaborated and optimized together with the other manufacturing dynamics to find balanced and optimal ways to achieve better performance. |
| author2 |
Xie, Lihua |
| author_facet |
Xie, Lihua Zhao, Xian. |
| format |
Theses and Dissertations |
| author |
Zhao, Xian. |
| author_sort |
Zhao, Xian. |
| title |
Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry |
| title_short |
Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry |
| title_full |
Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry |
| title_fullStr |
Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry |
| title_full_unstemmed |
Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry |
| title_sort |
event-based manufacturing modeling for design of a smart equipment management system (sems) for semiconductor industry |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/4031 |
| _version_ |
1772827849785344000 |