Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry

Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry

In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly...

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書目詳細資料
主要作者:	Zhao, Xian.
其他作者:	Xie, Lihua
格式:	Theses and Dissertations
出版:	2008
主題:	DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
在線閱讀:	http://hdl.handle.net/10356/4031
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University

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