Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry
In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/4031 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |