Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry

• 主要作者: Zhao, Xian.
• 其他作者: Xie, Lihua
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• 在線閱讀: http://hdl.handle.net/10356/4031
• 機構: Nanyang Technological University

In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly...