Machining of brittle materials using precision crack-off

At present, a high wasteful and time-consuming method is widely used in silicon fabrication industry for slicing silicon wafers. To minimize the cost as well as shorten lead time, a new fabrication method should be brought out. The objective of this project is to verify and develop precision crac...

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Bibliographic Details
Main Author: Ma, Ji
Other Authors: Sathyan Subbiah
Format: Final Year Project
Language:English
Published: 2010
Subjects:
Online Access:http://hdl.handle.net/10356/40675
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Institution: Nanyang Technological University
Language: English
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