Development of in situ monitoring for micro-electrical discharge machining

With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the...

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Main Author: Willy Kurnia
Other Authors: Yeo Swee Hock
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Online Access:https://hdl.handle.net/10356/41569
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-415692023-03-11T17:48:09Z Development of in situ monitoring for micro-electrical discharge machining Willy Kurnia Yeo Swee Hock School of Mechanical and Aerospace Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the fabrication of three-dimensional complex microcomponents and microstructures from metallic and semiconductor substrate. MASTER OF ENGINEERING (MAE) 2010-07-21T07:04:35Z 2010-07-21T07:04:35Z 2008 2008 Thesis Willy, K. (2008). Development of in situ monitoring for micro-electrical discharge machining. Master’s thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/41569 10.32657/10356/41569 en 131 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Willy Kurnia
Development of in situ monitoring for micro-electrical discharge machining
description With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the fabrication of three-dimensional complex microcomponents and microstructures from metallic and semiconductor substrate.
author2 Yeo Swee Hock
author_facet Yeo Swee Hock
Willy Kurnia
format Theses and Dissertations
author Willy Kurnia
author_sort Willy Kurnia
title Development of in situ monitoring for micro-electrical discharge machining
title_short Development of in situ monitoring for micro-electrical discharge machining
title_full Development of in situ monitoring for micro-electrical discharge machining
title_fullStr Development of in situ monitoring for micro-electrical discharge machining
title_full_unstemmed Development of in situ monitoring for micro-electrical discharge machining
title_sort development of in situ monitoring for micro-electrical discharge machining
publishDate 2010
url https://hdl.handle.net/10356/41569
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