A micromachined condenser microphone with SU-8 back plate

The advancement of silicon micromachining technology has increased the commercial production potential of silicon condenser microphones. Possessing low noise and high sensitivity, silicon condenser microphones can be used in a wide range of fields like mobile communications and in hearing devices. T...

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Bibliographic Details
Main Author: Tan, Zhengyi.
Other Authors: Miao Jianmin
Format: Final Year Project
Language:English
Published: 2010
Subjects:
Online Access:http://hdl.handle.net/10356/41583
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Institution: Nanyang Technological University
Language: English