A micromachined condenser microphone with SU-8 back plate
The advancement of silicon micromachining technology has increased the commercial production potential of silicon condenser microphones. Possessing low noise and high sensitivity, silicon condenser microphones can be used in a wide range of fields like mobile communications and in hearing devices. T...
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Main Author: | Tan, Zhengyi. |
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Other Authors: | Miao Jianmin |
Format: | Final Year Project |
Language: | English |
Published: |
2010
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/41583 |
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Institution: | Nanyang Technological University |
Language: | English |
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