Formation of silicide films in advanced silicon devices using excimer pulsed laser annealing

• المؤلف الرئيسي: Chow, Fong Ling
• مؤلفون آخرون: Lee Pooi See
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/4161
• المؤسسة: Nanyang Technological University

This research project studies the formation of Co silicides by KrF excimer pulsed laser annealing for possible applications to Si technologies. Capping layer such as Ti and TiN, which acts as a protective layer, was used to study the optical coupling effect of laser-annealed Co silicide.