Investigation into optical nanolithography employing wavefront engineering techniques and evanescent waves interference

• Main Author: Chua, Jeun Kee
• Other Authors: Murukeshan Vadakke Matham
• Format: Theses and Dissertations
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Nanotechnology
• Online Access: https://hdl.handle.net/10356/41659
• Institution: Nanyang Technological University

Optical lithography is an important process in the realization and advancement of nanotechnology. This thesis proposes and investigates potential approaches to ameliorate process issues associated to patterning at high resolution as well as to achieve patterning resolution beyond fundamental limitat...