Fabrication of partial SOI power structures

This report is about the Silicon-on-insulator (SOI) technology.

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Bibliographic Details
Main Author:	Gao, Xiao Fang
Other Authors:	Tan, Cher Ming
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Online Access:	http://hdl.handle.net/10356/4273
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4273
record_format	dspace
spelling	sg-ntu-dr.10356-42732023-07-04T15:20:06Z Fabrication of partial SOI power structures Gao, Xiao Fang Tan, Cher Ming School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors This report is about the Silicon-on-insulator (SOI) technology. Master of Engineering 2008-09-17T09:48:08Z 2008-09-17T09:48:08Z 2001 2001 Thesis http://hdl.handle.net/10356/4273 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors Gao, Xiao Fang Fabrication of partial SOI power structures
description	This report is about the Silicon-on-insulator (SOI) technology.
author2	Tan, Cher Ming
author_facet	Tan, Cher Ming Gao, Xiao Fang
format	Theses and Dissertations
author	Gao, Xiao Fang
author_sort	Gao, Xiao Fang
title	Fabrication of partial SOI power structures
title_short	Fabrication of partial SOI power structures
title_full	Fabrication of partial SOI power structures
title_fullStr	Fabrication of partial SOI power structures
title_full_unstemmed	Fabrication of partial SOI power structures
title_sort	fabrication of partial soi power structures
publishDate	2008
url	http://hdl.handle.net/10356/4273
_version_	1772827640236867584

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