Fabrication of partial SOI power structures

This report is about the Silicon-on-insulator (SOI) technology.

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Bibliographic Details
Main Author:	Gao, Xiao Fang
Other Authors:	Tan, Cher Ming
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Online Access:	http://hdl.handle.net/10356/4273
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Institution:	Nanyang Technological University

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