Plasma induced quantum well intermixing for photonic integration

In this thesis, Ar plasma induced intermixing has been developed with various plasma systems, including Inductively Coupled Plasma (ICP) machine. A plasma induced QWI technique has been demonstrated to successfully tune a wide range of III-V compound semiconductor materials for photonic integration...

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Bibliographic Details
Main Author: Hery Susanto Djie
Other Authors: Philip Dowd
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/4350
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Institution: Nanyang Technological University