Plasma-induced quantum well intermixing for monolithic photonic integration

• Main Authors: Djie, Hery Susanto, Mei, Ting
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: https://hdl.handle.net/10356/90930; http://hdl.handle.net/10220/6420
• Institution: Nanyang Technological University

Plasma-induced quantum well intermixing (QWI) has been developed for tuning the bandgap of III-V compound semiconductor materials using an inductively coupled plasma system at the postgrowth level. In this paper, we present the capability of the technique for a high-density photonic integration proc...