Plasma induced quantum well intermixing for photonic integration

In this thesis, Ar plasma induced intermixing has been developed with various plasma systems, including Inductively Coupled Plasma (ICP) machine. A plasma induced QWI technique has been demonstrated to successfully tune a wide range of III-V compound semiconductor materials for photonic integration...

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Bibliographic Details
Main Author:	Hery Susanto Djie
Other Authors:	Philip Dowd
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Online Access:	https://hdl.handle.net/10356/4350
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4350
record_format	dspace
spelling	sg-ntu-dr.10356-43502023-07-04T17:37:58Z Plasma induced quantum well intermixing for photonic integration Hery Susanto Djie Philip Dowd Lam Yee Loy Mei Ting School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics In this thesis, Ar plasma induced intermixing has been developed with various plasma systems, including Inductively Coupled Plasma (ICP) machine. A plasma induced QWI technique has been demonstrated to successfully tune a wide range of III-V compound semiconductor materials for photonic integration applications. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:49:48Z 2008-09-17T09:49:48Z 2005 2005 Thesis Hery, S. D. (2005). Plasma induced quantum well intermixing for photonic integration. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4350 10.32657/10356/4350 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Hery Susanto Djie Plasma induced quantum well intermixing for photonic integration
description	In this thesis, Ar plasma induced intermixing has been developed with various plasma systems, including Inductively Coupled Plasma (ICP) machine. A plasma induced QWI technique has been demonstrated to successfully tune a wide range of III-V compound semiconductor materials for photonic integration applications.
author2	Philip Dowd
author_facet	Philip Dowd Hery Susanto Djie
format	Theses and Dissertations
author	Hery Susanto Djie
author_sort	Hery Susanto Djie
title	Plasma induced quantum well intermixing for photonic integration
title_short	Plasma induced quantum well intermixing for photonic integration
title_full	Plasma induced quantum well intermixing for photonic integration
title_fullStr	Plasma induced quantum well intermixing for photonic integration
title_full_unstemmed	Plasma induced quantum well intermixing for photonic integration
title_sort	plasma induced quantum well intermixing for photonic integration
publishDate	2008
url	https://hdl.handle.net/10356/4350
_version_	1772825849658081280

Plasma induced quantum well intermixing for photonic integration

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