Studies of optical properties of silicon-rich silicon nitride thin films

• 主要作者: Cen, Zhanhong
• 其他作者: Chen Tupei
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2011
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• 在線閱讀: http://hdl.handle.net/10356/44566

Silicon-rich silicon nitride (SRN) thin films were synthesized by either Si ion implantation into silicon nitride films or plasma enhanced chemical vapor deposition (PECVD). Si nanoparticles embedded in the silicon nitride matrix are precipitated by the excess Si atoms. Optical properties of the Si...