Koo, C. K., & Yuan, L. X. (2008). Application of phase shift masking to sub-0.13 micron lithography.
Chicago Style CitationKoo, Chee Kiong., and Larry X.-C Yuan. Application of Phase Shift Masking to Sub-0.13 Micron Lithography. 2008.
MLA引文Koo, Chee Kiong., and Larry X.-C Yuan. Application of Phase Shift Masking to Sub-0.13 Micron Lithography. 2008.
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