Process integration issues in the development of 0.18um 1.8v LP SRAM using local interconnect

• Main Author: Lal, Manni
• Other Authors: Lau, Wai Shing
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/4553
• Institution: Nanyang Technological University

This dissertation presents the development issues encountered during the present development of 0.18um LP (low-power) SRAM in Chartered Semiconductor Manufacturing Lid. All integration issues are explained with data and cross-sectional scanning electron micrographs for better explanation