Predictive intelligence for process correlation modeling

• Main Author: Chan, Ronald Yuen Siang.
• Other Authors: Er Meng Joo
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Computer hardware, software and systems
• Online Access: http://hdl.handle.net/10356/45878
• Institution: Nanyang Technological University

Advances in technology like the miniaturization of electronic devices have caused wafer fabrication to be a competitive field. In order to succeed in the wafer fabrication industry, one way is to increase the process yield. This can be done by decreasing the downtime of machines and increasing the q...