Predictive intelligence for process correlation modeling
Advances in technology like the miniaturization of electronic devices have caused wafer fabrication to be a competitive field. In order to succeed in the wafer fabrication industry, one way is to increase the process yield. This can be done by decreasing the downtime of machines and increasing the q...
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Main Author: | Chan, Ronald Yuen Siang. |
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Other Authors: | Er Meng Joo |
Format: | Final Year Project |
Language: | English |
Published: |
2011
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/45878 |
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Institution: | Nanyang Technological University |
Language: | English |
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