Hot embossing of micro devices
In today industrial, Micro-Electro-Mechanical Systems (MEMS) technology is commonly used. For commercialization of this technology, the 2 main criteria are low cost fabrication and also high volume production. Due to these 2 reasons, in recent years, there is a shift of products from silicon based m...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2011
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| Online Access: | http://hdl.handle.net/10356/46379 |
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| Institution: | Nanyang Technological University |
| Language: | English |