Hot embossing of micro devices

Hot embossing of micro devices

In today industrial, Micro-Electro-Mechanical Systems (MEMS) technology is commonly used. For commercialization of this technology, the 2 main criteria are low cost fabrication and also high volume production. Due to these 2 reasons, in recent years, there is a shift of products from silicon based m...

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書目詳細資料
主要作者:	Yang, Yong Lin
其他作者:	Tor Shu Beng
格式:	Final Year Project
語言:	English
出版:	2011
主題:	DRNTU::Engineering::Mechanical engineering
在線閱讀:	http://hdl.handle.net/10356/46379
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University
語言:	English

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