Design and fabrication of MEMS optical switches

This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.

Saved in:

Bibliographic Details
Main Author:	Li, Jing
Other Authors:	Liu, Ai Qun
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Online Access:	https://hdl.handle.net/10356/4640
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4640
record_format	dspace
spelling	sg-ntu-dr.10356-46402023-07-04T17:18:52Z Design and fabrication of MEMS optical switches Li, Jing Liu, Ai Qun School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:55:48Z 2008-09-17T09:55:48Z 2006 2006 Thesis Li, J. (2006). Design and fabrication of MEMS optical switches. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4640 10.32657/10356/4640 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Li, Jing Design and fabrication of MEMS optical switches
description	This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.
author2	Liu, Ai Qun
author_facet	Liu, Ai Qun Li, Jing
format	Theses and Dissertations
author	Li, Jing
author_sort	Li, Jing
title	Design and fabrication of MEMS optical switches
title_short	Design and fabrication of MEMS optical switches
title_full	Design and fabrication of MEMS optical switches
title_fullStr	Design and fabrication of MEMS optical switches
title_full_unstemmed	Design and fabrication of MEMS optical switches
title_sort	design and fabrication of mems optical switches
publishDate	2008
url	https://hdl.handle.net/10356/4640
_version_	1772828596834926592

Design and fabrication of MEMS optical switches

Similar Items