Design and fabrication of MEMS optical switches

• المؤلف الرئيسي: Li, Jing
• مؤلفون آخرون: Liu, Ai Qun
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/4640
• المؤسسة: Nanyang Technological University

This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.