Design and fabrication of MEMS optical switches

• Main Author: Li, Jing
• Other Authors: Liu, Ai Qun
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: https://hdl.handle.net/10356/4640
• Institution: Nanyang Technological University

This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.