Design and fabrication of MEMS optical switches
This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/4640 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |