Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications

Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications

79 p.

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Bibliographic Details
Main Author: Shi, Xu.
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2011
Subjects:
DRNTU::Engineering::Electrical and electronic engineering
Online Access:http://hdl.handle.net/10356/46608
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Institution: Nanyang Technological University
Description
Summary:79 p.

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