Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications

79 p.

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Main Author: Shi, Xu.
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2011
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Online Access:http://hdl.handle.net/10356/46608
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-466082023-03-04T03:20:59Z Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications Shi, Xu. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering 79 p. An improved drift approximation model with an added radial electrostatic field has been successfully developed. Our model provides a computationally efficient way of quantitatively describing the plasma motion and predict the plasma behavior in the toroidal solenoid in a Filtered Cathodic Vacuum Arc (FCVA) system. The Storer's experimental results have been successfully simulated by this model. CUED-03 2011-12-21T03:06:47Z 2011-12-21T03:06:47Z 1996 1996 Research Report http://hdl.handle.net/10356/46608 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Shi, Xu.
Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
description 79 p.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Shi, Xu.
format Research Report
author Shi, Xu.
author_sort Shi, Xu.
title Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
title_short Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
title_full Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
title_fullStr Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
title_full_unstemmed Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
title_sort fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
publishDate 2011
url http://hdl.handle.net/10356/46608
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