Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications
79 p.
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2011
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sg-ntu-dr.10356-466082023-03-04T03:20:59Z Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications Shi, Xu. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering 79 p. An improved drift approximation model with an added radial electrostatic field has been successfully developed. Our model provides a computationally efficient way of quantitatively describing the plasma motion and predict the plasma behavior in the toroidal solenoid in a Filtered Cathodic Vacuum Arc (FCVA) system. The Storer's experimental results have been successfully simulated by this model. CUED-03 2011-12-21T03:06:47Z 2011-12-21T03:06:47Z 1996 1996 Research Report http://hdl.handle.net/10356/46608 Nanyang Technological University application/pdf |
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DRNTU::Engineering::Electrical and electronic engineering Shi, Xu. Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications |
description |
79 p. |
author2 |
School of Electrical and Electronic Engineering |
author_facet |
School of Electrical and Electronic Engineering Shi, Xu. |
format |
Research Report |
author |
Shi, Xu. |
author_sort |
Shi, Xu. |
title |
Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications |
title_short |
Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications |
title_full |
Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications |
title_fullStr |
Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications |
title_full_unstemmed |
Fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications |
title_sort |
fabrication and characterisation of amorphous diamond-like carbon films using filtered vacuum arc and ion beam sputtering techniques for device and resistive coating applications |
publishDate |
2011 |
url |
http://hdl.handle.net/10356/46608 |
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1759854477746110464 |