Study of SIC oxidation for device application

167 p.

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Bibliographic Details
Main Author:	Zhao, Pan
Other Authors:	Rusli
Format:	Theses and Dissertations
Published:	2011
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	https://hdl.handle.net/10356/46856
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Institution:	Nanyang Technological University

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