Reliable and high speed RF MEMS switches with wafer-scale encapsulation

181 p.

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Bibliographic Details
Main Author: Ke, Feixiang
Other Authors: Miao Jianmin
Format: Theses and Dissertations
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/47243
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Institution: Nanyang Technological University