Characterization of nickel-titanium based thin films crystallized by fast and ultra-fast annealing methods
Titanium-nickel based thin films can be used as actuators in micro-electro-mechanical systems (MEMS) in such applications as valves, pumps, grippers and sensors. These films are typically prepared using magnetron sputtering. The resultant films are amorphous if deposited at room temperature and anne...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2012
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| Online Access: | https://hdl.handle.net/10356/48649 |
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| Institution: | Nanyang Technological University |
| Language: | English |