Investigations into plasmonic lithography concepts for high resolution nanoscale feature patterning
Plasmonic lithography, which is not restricted by free space diffraction limit, is one of the potential research thrust areas as it offers the possibility for high resolution nanopatterning. This thesis investigates novel concepts and relative configurations of plasmonic lithography to fabricate nan...
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| 格式: | Theses and Dissertations |
| 語言: | English |
| 出版: |
2012
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| 在線閱讀: | https://hdl.handle.net/10356/48682 |
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| 機構: | Nanyang Technological University |
| 語言: | English |