Hermetic sealing of MEMS sensors for high temperature electronics applications

• 主要作者: Muhammad Afiq Sani.
• 其他作者: Gan Chee Lip
• 格式: Final Year Project
• 語言: English
• 出版: 2012
• 主題: DRNTU::Engineering::Materials::Testing of materials; DRNTU::Engineering::Materials::Functional materials
• 在線閱讀: http://hdl.handle.net/10356/48873
• 機構: Nanyang Technological University

In this study, 100 μm sealing width of both Al-Ge eutectic bonds and Pt-In Transient Liquid Phase bonds were fabricated and evaluated. The experiments were conducted to determine the feasibility of the bonding for usage in high temperature applications. The samples underwent shear tes...