Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially use...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2012
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| Online Access: | http://hdl.handle.net/10356/49294 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially used technique for fabricating nanostructure in semi-conductor and other applications. Using the principle of interference, periodic nanopatterns or structures can be cost effectively fabricated over large areas which are utilized in many applications. |
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