Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography

Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography

Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially use...

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Main Author: Mohamed Fahmin.
Other Authors: Murukeshan Vadakke Matham
Format: Final Year Project
Language:English
Published: 2012
Subjects:
DRNTU::Engineering::Mechanical engineering
Online Access:http://hdl.handle.net/10356/49294
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Institution: Nanyang Technological University
Language: English
id sg-ntu-dr.10356-49294
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spelling sg-ntu-dr.10356-492942023-03-04T18:43:43Z Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography Mohamed Fahmin. Murukeshan Vadakke Matham School of Mechanical and Aerospace Engineering MicroMachines Centre DRNTU::Engineering::Mechanical engineering Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially used technique for fabricating nanostructure in semi-conductor and other applications. Using the principle of interference, periodic nanopatterns or structures can be cost effectively fabricated over large areas which are utilized in many applications. Bachelor of Engineering (Mechanical Engineering) 2012-05-17T03:41:44Z 2012-05-17T03:41:44Z 2012 2012 Final Year Project (FYP) http://hdl.handle.net/10356/49294 en Nanyang Technological University 76 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
spellingShingle DRNTU::Engineering::Mechanical engineering
Mohamed Fahmin.
Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
description Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially used technique for fabricating nanostructure in semi-conductor and other applications. Using the principle of interference, periodic nanopatterns or structures can be cost effectively fabricated over large areas which are utilized in many applications.
author2 Murukeshan Vadakke Matham
author_facet Murukeshan Vadakke Matham
Mohamed Fahmin.
format Final Year Project
author Mohamed Fahmin.
author_sort Mohamed Fahmin.
title Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
title_short Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
title_full Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
title_fullStr Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
title_full_unstemmed Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
title_sort nanopatterning of 2d periodic structures using multi-facet prism based interferometric lithography
publishDate 2012
url http://hdl.handle.net/10356/49294
_version_ 1759853720783290368

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