Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography

• Main Author: Mohamed Fahmin.
• Other Authors: Murukeshan Vadakke Matham
• Format: Final Year Project
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/49294
• Institution: Nanyang Technological University

Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially use...