Novel quantum well intermixing technique using gray mask technology for photonic integrated circuits

• Main Author: Ng, Seng Lee.
• Other Authors: Lam, Yee Loy
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: http://hdl.handle.net/10356/4961
• Institution: Nanyang Technological University

In this thesis, a low energy shallow ion implantation induced disordering process has been developed in order to tune the energy bandgap shift in InGaAs/InGaAsP multiple quantum well laser structures.