Development of pulsed laser deposition system

• Main Author: Nguyen Tien Duong
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/49693
• Institution: Nanyang Technological University

Pulsed Laser Deposition (PLD) is an emerging technology, which is versatile tool for thin-film research. From the first found in years 1980’s, PLD system has received an intensive development due to its wide-range application in various areas of thin-film and multilayer research. The advantages of P...