Intelligent supervisory control for microelectronics fabrication

• 主要作者: Ling, Sze Ling.
• 其他作者: Ling Keck Voon
• 格式: Final Year Project
• 語言: English
• 出版: 2012
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• 在線閱讀: http://hdl.handle.net/10356/50165
• 機構: Nanyang Technological University

In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the waf...