Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application

• Main Author: Soe, Oak.
• Other Authors: Tan Chuan Seng
• Format: Final Year Project
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/50910
• Institution: Nanyang Technological University

As the demand for MEMS devices operating in high temperature environment is increasing, it is important to ensure and improve the reliability of the devices. In this project, test structure with integrated metal thin film micro-heater and resistance temperature detector was used for high temperature...