Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application

As the demand for MEMS devices operating in high temperature environment is increasing, it is important to ensure and improve the reliability of the devices. In this project, test structure with integrated metal thin film micro-heater and resistance temperature detector was used for high temperature...

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Main Author: Soe, Oak.
Other Authors: Tan Chuan Seng
Format: Final Year Project
Language:English
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/10356/50910
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-509102023-07-07T17:29:55Z Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application Soe, Oak. Tan Chuan Seng School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering As the demand for MEMS devices operating in high temperature environment is increasing, it is important to ensure and improve the reliability of the devices. In this project, test structure with integrated metal thin film micro-heater and resistance temperature detector was used for high temperature micro-tensile test. Instead of furnace which requires heating of other equipment components, localized resistive heating method by using integrated titanium/platinum (Ti/Pt) thin film micro-heater was proposed. This report describes the development of a novel high temperature micro-tensile test and design consideration of the test structure. Electro-thermal performance of the integrated micro-heater was first analysed, followed by the micro-tensile test of single crystal silicon (SCS) test specimen with (100) surface orientation and <110> tensile direction at elevated temperatures, up to 300 °C. Effect of temperature on the Young’s modulus was presented with the experimental results. Bachelor of Engineering 2012-12-17T07:31:02Z 2012-12-17T07:31:02Z 2012 2012 Final Year Project (FYP) http://hdl.handle.net/10356/50910 en Nanyang Technological University 65 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Soe, Oak.
Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
description As the demand for MEMS devices operating in high temperature environment is increasing, it is important to ensure and improve the reliability of the devices. In this project, test structure with integrated metal thin film micro-heater and resistance temperature detector was used for high temperature micro-tensile test. Instead of furnace which requires heating of other equipment components, localized resistive heating method by using integrated titanium/platinum (Ti/Pt) thin film micro-heater was proposed. This report describes the development of a novel high temperature micro-tensile test and design consideration of the test structure. Electro-thermal performance of the integrated micro-heater was first analysed, followed by the micro-tensile test of single crystal silicon (SCS) test specimen with (100) surface orientation and <110> tensile direction at elevated temperatures, up to 300 °C. Effect of temperature on the Young’s modulus was presented with the experimental results.
author2 Tan Chuan Seng
author_facet Tan Chuan Seng
Soe, Oak.
format Final Year Project
author Soe, Oak.
author_sort Soe, Oak.
title Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
title_short Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
title_full Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
title_fullStr Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
title_full_unstemmed Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
title_sort design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
publishDate 2012
url http://hdl.handle.net/10356/50910
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