Investigation into interferometric sub-wavelength periodic feature fabrication and their applications

• المؤلف الرئيسي: Sidharthan Raghuraman
• مؤلفون آخرون: Franck Alexis Chollet
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Science::Physics::Optics and light; DRNTU::Engineering::Nanotechnology
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/50922

Fabrication of sub-wavelength periodic structures requires advanced lithographic techniques so as to achieve uniform, large area patterns. Novel interference lithographic concepts/methodologies are proposed theoretically followed by experimental validation to fabricate uniform large area sub-wavele...