Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
Fabrication of sub-wavelength periodic structures requires advanced lithographic techniques so as to achieve uniform, large area patterns. Novel interference lithographic concepts/methodologies are proposed theoretically followed by experimental validation to fabricate uniform large area sub-wavele...
Saved in:
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | Theses and Dissertations |
| 語言: | English |
| 出版: |
2012
|
| 主題: | |
| 在線閱讀: | https://hdl.handle.net/10356/50922 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Nanyang Technological University |
| 語言: | English |