A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films

A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films

In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied.

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Bibliographic Details
Main Author: Cheng, Hao
Other Authors: Peter Hing
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/5098
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-5098
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spelling sg-ntu-dr.10356-50982020-06-01T11:56:54Z A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films Cheng, Hao Peter Hing School of Materials Science & Engineering Alfred Tok Iing Yoong DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied. DOCTOR OF PHILOSOPHY (SME) 2008-09-17T10:19:55Z 2008-09-17T10:19:55Z 2005 2005 Thesis Cheng, H. (2005). A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/5098 10.32657/10356/5098 Nanyang Technological University 186 p. application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
topic DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Cheng, Hao
A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
description In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied.
author2 Peter Hing
author_facet Peter Hing
Cheng, Hao
format Theses and Dissertations
author Cheng, Hao
author_sort Cheng, Hao
title A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
title_short A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
title_full A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
title_fullStr A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
title_full_unstemmed A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
title_sort study on the orientated growth, microstructure and thermal conductivity of rf reactively sputtered ain films
publishDate 2008
url https://hdl.handle.net/10356/5098
_version_ 1681059387438792704

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