A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films

• Main Author: Cheng, Hao
• Other Authors: Peter Hing
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/5098
• Institution: Nanyang Technological University

In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied.