Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing

• Main Author: Chia, Mark Sebastian Xiong Wei.
• Other Authors: Miao Jianmin
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Nanotechnology
• Online Access: http://hdl.handle.net/10356/51036
• Institution: Nanyang Technological University

This report consists of the author’s work which was to develop an array of Piezoresistive MEMs pressure sensors which are capable of operating in harsh underwater environment and conditions. The inspiration was to develop a MEMS artificial lateral-line sensory system, mimicking the structural features of the biological lateral-line of the blind cave fish. The report also illustrates the steps taken to form a MEMs sensor array using both both Liquid crystal polymer (LCP) and Polydimethylsiloxan (PDMS) for packaging and fabrication purposes. Lastly the report also includes experiments to test the static pressure sensing and dynamic pressure sensing capabilities of the sensor array, at the same time performing sensor calibration.