Fabrication and packaging of piezoelectic MEMS flow sensor array
The report consists of the author’s work in developing an array of piezoelectric MEMS pressure sensors. The design inspiration for the array of sensor came from the structural features of the biological lateral line of the blind cave fish. The MEMS artificial lateral line sensory system was fabricat...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2014
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| Online Access: | http://hdl.handle.net/10356/60239 |
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| Institution: | Nanyang Technological University |
| Language: | English |