Fabrication and packaging of piezoelectic MEMS flow sensor array

• Main Author: Ng, Boon Siong
• Other Authors: John Edward Beck
• Format: Final Year Project
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Nanotechnology
• Online Access: http://hdl.handle.net/10356/60239
• Institution: Nanyang Technological University

The report consists of the author’s work in developing an array of piezoelectric MEMS pressure sensors. The design inspiration for the array of sensor came from the structural features of the biological lateral line of the blind cave fish. The MEMS artificial lateral line sensory system was fabricated to not only mimic the structural features but also to emulate the sensing function of the biological lateral line. The report illustrates the steps taken in designing and fabricating a MEMS sensor apart from the incorporation of 3D printing methods into the packing process. This report will provide an explanation on how fish use their lateral line to detect motion in the murky water around them and also provide a review of the morphology of the fish lateral line. The report will also showcase how lateral line system was copied into a man-made system designed to allow underwater sensing using piezoelectric sensors to generate all of its required operating electricity from the movement of the water. Lastly, the report will show the experimental tests done on the ability to function underwater, the sensitivity of the sensor and the significance of the findings in the experiments done.