Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing

This report consists of the author’s work which was to develop an array of Piezoresistive MEMs pressure sensors which are capable of operating in harsh underwater environment and conditions. The inspiration was to develop a MEMS artificial lateral-line sensory system, mimicking the structural featur...

Full description

Saved in:
Bibliographic Details
Main Author: Chia, Mark Sebastian Xiong Wei.
Other Authors: Miao Jianmin
Format: Final Year Project
Language:English
Published: 2013
Subjects:
Online Access:http://hdl.handle.net/10356/51036
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English

Similar Items