Characterization of Si nanowires-based piezoresistive pressure sensor by dynamic cycling test

Characterization of Si nanowires-based piezoresistive pressure sensor by dynamic cycling test

10.1109/IPFA.2012.6306318

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Bibliographic Details
Main Authors: Lou, L., Yan, H., He, C., Park, W.-T., Kwong, D.-L., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Fatigue
large compressive strain
piezoresistive
pressure sensor
silicon nanowire
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83544
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83544

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