Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers

10.1016/j.proeng.2011.12.354

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Bibliographic Details
Main Authors: Lou, L., Zhang, S., Lim, L., Park, W.-T., Feng, H., Kwong, D.-L., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83535
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Institution: National University of Singapore